Modeling and Experimental Characterization of an Active MEMS Based Force Sensor


Active force sensors are based on the principle of force balancing using a feedback control. They allow, unlike passive sensors, the measurement of forces in a wide range with nanoNewton resolutions. This capability is fundamental when dealing with the mechanical characterization of samples with a wide range of stiffness. This paper deals with the modeling and the experimental characterization of a new active MEMS based force sensor. This sensor includes folded-flexure type suspensions and a differential comb drive actuation allowing a linear force/voltage relationship. A control oriented electromechanical model is proposed and validated experimentally in static and dynamic operating modes using a stroboscopic measurement system. The sensor has a resonant frequency of 2.2 kHz, and a static passive measurement range of $±$2.45 $μ$N. This work is the first step toward new dynamic measuring capabilities and sensing at the micro/nano-scales when high dynamic, large measurement range and nanoNewton resolution are required.

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
Post Doctoral Fellow

My research interests include haptic, mechatronics, micro-robotic and hci.